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Excimer UV fused silica viewports

Fig.1 CF flange style

Fig.2 Weldable style

Technical information
Size View diameter B C F G Fig. Part number
CF40 36 3.30 1 3-FS-0116
CF63 68 6.35 1 3-FS-0117
Weldable 35 3.30 44.70 38.10 1.65 2
Weldable 60 6.35 73.15 63.50 1.65 2
Specifications
Vacuum: 10-11 mbar
Temperature: -100°C to 200°C (150°C for Iso flanges)
Thermal gradient: 20°C/min

 Excimer UV specifications & wavelength here

 Annealed copper gaskets should be used with CF types

 Cleaning procedures here

 AR coating on single or both sides available, please contact our sales office

 AISI 316LN flanges available upon request